Method for optical inspection of nanoscale objects based upon analysis of their defocused images and features of its practical implementation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Optics Express
سال: 2013
ISSN: 1094-4087
DOI: 10.1364/oe.21.024483